(pictured above) sod vacuum sintering furnace
Sod vacuum sintering furnace is mainly applied to power semiconductor devices and sintering, welding process
Equipment parameters
Size: Φ 350mm
Use A set of work: heat, A, B and C tube alternate work
Working temperature: 300-1000℃Temperature 1000mm ± 3 degrees
The cold vacuum: 5 Χ 10-4Pa
The vacuum system: JiXieBeng + K300 diffusion pump
Φ 300 pneumatic flap valve: mainly valve valve and import solenoid valves
Power: 47KW
Vacuum composite number list.
Inflatable types: N2, argon, H2
Automatic and manual control system
Double-position vacuum sintering furnace
Double-position vacuum sintering furnace is mainly applied to power semiconductor devices and sintering, welding process
Equipment parameters
The vacuum chamber stations count: 1-3
1x10:3Pa vacuum pump, diffusion - for 5x10-6Pa
Working temperature: 1000 ℃.Inflate the highest pressure: 0.5 Mpa (controlled)
Stainless steel container Φ: 150 - Φ 350x1300
Wen: 600-1200mm ，± 1℃
Temperature control mode: 3 three imported Japanese precision of thermostat-thermo-bimetal sheet
Temperature control curve for 9: cool/ 999 hours
Work: automatically or manually
Single-point accuracy ± 10℃/24h
Positive pressure and negative pressure are using digital display table
Double-position alternately, walking X, Y direction
Horizontal vacuum sintering furnace
Horizontal vacuum sintering furnace is mainly used in semiconductor, metallurgy and other industries, vacuum heat treatment technology
Equipment parameters
Working temperature: 400-1200 ° c
Single point temperature control accuracy ± 10 degrees than: 24h
The isothermal zone length: 200-400mm / ± 1mm
Heating power: 3-6KW
Heating time (to 1200oC) < 750min
Insulation power: < 3KW
Fixed repetitive 1mm: again
Restarting repeatability: acuities ± 1 ° c
The cold vacuum: 5 x 10-3Pa
Vacuum diameter:Φ150-200mm
Envelop dimensions: 24 x 6 x 6
The total weight: about 360kg
Equipment working conditions:
Environmental temperature, 10-45 degrees Celsius
Relative humidity: more than 85 percent
Voltage: 380V ± 10%
Vacuum indoor with boat (stainless steel bracket),
Electric furnace movement speed 0-400mmm/min (adjustable)
According to user requirements with digital vacuum and electric valve
Vertical double-position vacuum furnace
Vertical double-position vacuum sintering furnace is mainly used in semiconductor devices, seal welded, the sinter solar -products drying, welding and metal tube and shell packaging, glass containers such tightness of sintering and various parts in hydrogen nitrogen protection under the process
Equipment parameters
The vacuum chamber stations count: 1-3
Vacuum 1X10:3Pa -, plus diffusion pump for 5x10-6
Working temperature: 100 ℃
Inflate the highest pressure: 0.5 Mpa (controlled)
Stainless steel container : Φ (150 - 350)x1300 (user)
Wen: 600-1200mm： ±1℃
Temperature control mode: 3 three imported Japanese high reliable thermostat
Temperature control curve for 9: cool / 999 hours
Work: automatically or manually
Single-point accuracy ± 1℃:24h
Positive pressure and negative pressure are using digital display table
But many also work |
